Description
Electrical, Force Modulation AFM Probe DESCRIPTION
TIP SPECIFICATIONS
CANTILEVER SPECIFICATIONS Electrical, Force Modulation AFM Probe Monolithic silicon AFM probe for force modulation and pulsed force mode (PFM), and electric modes such as: scanning capacitance microscopy (SCM)
electrostatic force microscopy (EFM)
Kelvin probe force microscopy (KFM)
scanning probe lithography The rotated tip allows for more symmetric representation of high sample features. The consistent tip radius ensures good resolution and reproducibility. The AFM holder chip fits most commercial AFM systems as it is industry standard size. AFM Tip SHAPE
Rotated Tip Height
17µm From 15µm To 19µm Tip Setback
15µm From 10µm To 20µm Tip Radius < 25nm Half Cone Angle
20°-25° along cantilever axis, 25°-30° from side, 10° at the apex AFM Cantilever Shape
Beam Force Constant
3N/m – From 1N/m To 7N/m Resonance Frequency
75kHz – From 60kHz To 90kHz Length 225µm – From 215µm To 235µm Width 50µm – From 45µm To 55µm Thickness 3µm – From 2µm To 4µm
